In this particular paper, the new lapping slurry and polishing slurry are launched. Along with the deliquescence degree of CLBO is fallen to lowest. A brand new Operating technology is usually adopted. Immediately after rough sprucing, the focus of ultra-precision sprucing slurry is greater appropriately. So does the extremely-precision sprucing pace, as well as the wiping speed is quicker in comparison to the deliquescence speed. The CLBO crystal area roughness can accomplish 1nm and keep the floor high quality perfectly. Accessibility as a result of your institution
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In accordance with the evidence-of-basic principle experiment, the conversion efficiency of 23% implied the possibility of achieving higher-electrical power at the next Stokes wavelength in the Raman laser. In case the pump laser of 1078 nm may very well be received at the common ability of fifty W, the output ability of its 2nd Stokes wavelength at 1512 nm could be much more than ten W. The design from the Raman laser cavity ought to be optimized to be able to steer clear of the destruction on the M1 and diamond surface area.
The standard energy in the NIR laser however has the opportunity to become improved to tens of watts including 70 W [26] In case the double-move configuration may be used with the Yb:YAG SCF amplifier phase. As a result, In case the conversion efficiency of 31% from NIR to DUV may be however maintained at this larger electricity affliction, the standard output power from the DUV laser at 258 nm might be over 20 W, which would be considered a exceptional energy level with the DUV laser and bring on the unanticipated DUV laser machining effects. Also, for high-electrical power DUV laser, the UV injury from the nonlinear crystal, including the Home windows for CLBO crystal plus the mirrors, is an additional crucial parameter for long-term and stable Procedure.
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Each the 1040 nm and 1078 nm laser come from just one twin-wavelength Yb-doped fiber laser. Each laser is amplified by stages of fiber amplifier and Yb-doped products amplifier, respectively.
On another facet, the ability scaling of the NIR laser is yet another element to increase the regular energy of your 193-nm DUV laser. A result of the lack of the significant-energy amplification Alternative in the NIR laser (for instance at 1553 nm), nonlinear frequency procedures for example optical parameter oscillation (OPO) may very well be applied to produce a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength in addition to acquiring relative higher electricity [21]. Recently, a diamond Raman laser showed its means in achieving a substantial power as well as a superior conversion efficiency with the 1st Stokes of your 1-μm laser [22,23], which suggests the chance to be applied inside the 193-nm DUV laser technology on account of its high Raman acquire and huge frequency shift.
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From the scientific and industrial purposes, the beam high-quality of the DUV laser can also be a vital parameter. Specially, the beam high-quality of the DUV laser significantly impacts the laser machining final results. The beam good quality on the DUV laser is set by that of the basic laser as well as the crystal to the frequency conversion. Just lately, a substantial-electrical power DUV laser (>10 W) at 258 nm was reported with a beam high-quality of M2 < one.5, which was generated by FHG of the Yb:YAG laser at 1030 nm utilizing the CLBO crystal [13]. This laser would result in a better laser machining final result when compared to the past DUV lasers with greater M2.
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Additionally, combining the good-state laser with other nonlinear approach such as stimulated Raman scattering, NIR lasers could possibly be attained at new wavelengths with high electricity and significant beam high-quality, which was tested from the proof-of-theory experiment. This Raman laser scheme supplies a completely new path to the more info high-power DUV laser, Particularly in the wavelength of 193 nm.
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